Plasma Parto

We specialize in design and fabrication of plasma and charged particle beam sources as well as
complete vacuum electronic equipments. As the first innovative product of our startup, we have
developed a versatile vacuum coating system, named IONEX, based on the ion beam deposition
(IBD) technology. IBD produces the highest quality thin films with excellent precision. This
state-of-the-art technology for PVD coating is used when tight control over film thickness and
stoichiometry is needed. Adhesion, density, non-porosity, uniformity and smoothness are some
important characteristics of a thin film which are significantly enhanced by IBD.
IONEX is the most advanced PVD platform and also the first IBD system manufactured in Iran.
Its capabilities include direct ion beam deposition, single and dual ion beam sputter deposition,
ion beam assisted or enhanced deposition [together with traditional methods such as resistive
evaporation, electron beam evaporation, magnetron sputtering], ion beam cleaning, ion beam
etching and so on. This all-in-one deposition system provides a unique opportunity for researchers to develop the next generation multilayer coatings.